Energy Conservation Through Demand Controlled
Filtration in Cleanrooms
Allen Hebert, Cornell University
The objective of my presentation is to describe the energy savings
that have been realized by implementing demand controlled filtration
in Cornell University's Duffield Hall cleanroom. Traditional cleanroom
filtration designs rely upon arbitrarily high recirculation air
change rates as a means of maintaining space conditions and classification
level. However, the disadvantage of this design is that the recirculation
air change rates are typically much higher than are necessary to
satisfy the cleanroom's design criteria. As a result, electrical
energy use required by the cleanroom's recirculation air handling
units is also unnecessarily high. To minimize electrical energy
use at Duffield, particle monitors have been installed at strategic
locations throughout the cleanroom to continuously measure particle
counts. The particle count data is used to automatically control
the cleanroom's recirculation air handling units over the building's
direct digital control system. The recirculation air change rates
are therefore determined as a function of particle count in real-time
rather than by a predetermined arbitrarily high air change rate.
In sum, electrical energy use at Duffield has been substantially
reduced while maintaining the cleanroom's exact space conditions
and classification level.
Findings:
As suggested above, I will present data to confirm that energy
use at Cornell University's Duffield Hall cleanroom has been substantially
reduced by implementing demand controlled filtration.
Labs21 Connection:
My presentation will reflect the Labs21 Approach to laboratory
design by "Employ[ing] a Broad Range of Sustainable Energy
… Efficiency Strategies" with respect to Cornell University's
Duffield Hall cleanroom.
Biography:
Allen Hebert is an Energy Engineer at Cornell University.
He holds a Master's Degree in Electrical Engineering. He has worked
with Cornell's Division of Administration, Facilities, and Finance
for three years. Presently, he is managing the lab-building portion
of Cornell's Energy Conservation Initiative project. The ECI Project
is a five-year plan to reduce energy use at Cornell by 20% through
energy conservation.
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