Energy Efficient Design of Cleanroom Air Management Systems

Greg Owen, Jacobs

To maintain an optimum level of contamination control for research and development functions, typical cleanroom air management systems are typically designed to operate on a 24 / 7 / 365 basis, and with airflow rates ranging between 200 to 500 air changes per hour. This operational model results in the use of large amounts of energy, often 30 to 50 times what is required in a typical commercial office building, and closely rivals the energy usage of HVAC systems in modern day high-density Data Centers. This presentation is intended to identify design elements in a typical cleanroom that contribute to high energy usage and also to provide design guidelines for a facility where reduction in energy consumption is transparent to the user and where the required functionality of cleanroom space is maintained.

In achieving a transparent energy reduction, the cleanroom environment should feel and have the appearance of a facility with higher-energy usage while providing the required functional performance. Design requirements that must remain transparent to energy reduction include: Contamination control, and controlled temperature and humidity for human comfort.

The outlined energy reduction concepts involve changes to design elements for various air management systems, through selective application of the Affinity Laws (Fan Laws). The reduction in total Static pressure of the recirculation system is the primary impact variable in the change of Design Elements. Additional attention is given to the 'right sizing' of fans, motor / wheel combination, cleanroom air flow rates, filter coverage and unoccupied set-back strategies.

The degree of energy reduction from changes to design elements is compared against a 'baseline' system based on a common cleanroom recirculation and make-up air systems. The metrics used in evaluating such impacts is based on determining the CFM/kW required for a fixed amount or rate of supply air

Learning Objectives

• Cleanroom Energy consumption can be reduced
• Energy savings in Cleanrooms can result in capital cost reduction
• Energy Reduction in Cleanrooms does not have to adversely effect the operational effectiveness of the space

Biography:

Mr. Owen, A Professional engineer has over 30 years of experience in project management, engineering management, design and construction of contamination control facilities. He has held design and construction positions as Project Engineer, Project Manager, and Engineering Manager. He has extensive experience in mechanical and HVAC systems engineering and design. With Jacobs, Greg is the Cleanroom Design Principal with global responsibilty for Contamination Control Environment design.

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